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Semiconductor Pumps

iXL120 DryPump

iXL120 is a compact, low energy, 110 m3/h dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low ...

iXL 1000 DryPump

iXL1000 is a compact, low energy, 930 m3/h dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low ...

GX100 DryPump

The Edwards GX Dry Vacuum Pump sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure ...

GX600 DryPump

The Edwards GX Dry Vacuum Pump sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure ...

GX1000 DryPump

The Edwards GX Dry Vacuum Pump sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure ...

iXH

iXH sets new standards for really harsh process capabilities, reliability, and low cost of ownership. iXH pumps offer greatly increased dust and powder handling capabilities plus our innovative Gas Buster ...

EPX180L DryPump

The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ...

EPX180LE DryPump

The EPX LE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to ...

EPX180N DryPump

The EPX N series of pumps cannot be manually operated; they must be controlled and monitored by external control equipment, which must be connected to the EPX pump through the ...

EPX180NE DryPump

The EPX NE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to ...

EPX500L DryPump

The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ...

EPX500LE DryPump

The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership.The EPX LE series of pumps has an End User Controller (EUC). The End User Controller ...

EPX500N DryPump

The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ...

EPX500NE DryPump

The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ...

EH250 FX Booster Pump

Semiconductor. The EH mechanical booster pump, based on the simple Roots principle, remains the favourite pump for applications where high pumping speeds are required for pressures in the region of ...

EH500FX Booster Pump

Semiconductor. The EH mechanical booster pump, based on the simple Roots principle, remains the favourite pump for applications where high pumping speeds are required for pressures in the region of ...

EH1200FX Booster Pump

Semiconductor. The EH mechanical booster pump, based on the simple Roots principle, remains the favourite pump for applications where high pumping speeds are required for pressures in the region of ...

EH2600FX Booster Pump

Semiconductor. The EH mechanical booster pump, based on the simple Roots principle, remains the favourite pump for applications where high pumping speeds are required for pressures in the region of ...

EH4200FX Booster Pump

Industrial. The EH mechanical booster pump, based on the simple Roots principle, remains the favourite pump for applications where high pumping speeds are required for pressures in the region of ...