Edwards, the world leader in vacuum technology introduces the nEXT generation of turbomolecular pumps. The EXT and STP ranges (with in excess of 200,000 units in the field), nEXT sets the new benchmark for scientific turbo pumps.
An Edwards turbomolecular pump is a multistage axial-flow turbine in which high-speed rotating blades provide compression by increasing the probabilit...
An Edwards turbomolecular pump is a multistage axial-flow turbine in which high-speed rotating blades provide compression by increasing the probability of gas moving in the pumping direction. The turbomolecular pump is optimised for molecular flow conditions and requires a suitably sized backing pump to exhaust to atmosphere.
nEXT has been designed to combine all the latest technological advances in turbomolecular pumps offering pump sizes of 55, 85, 240, 300, 400, 730, 925 and 1250 l/s pumping speeds for Nitrogen.
These pumps provide end-user serviceability and deliver a truly class-leading product.
Why choose nEXT?
Superior performance with exceptional pumping speeds and compression ratios
Proven reliability for peace of mind we have years of experience and a huge install base of turbopumps
Flexible solutions with bespoke design service available
Ease of use thanks to integrated intelligent controls
Extended lifetime and low cost of ownership: the pumps are fully end user serviceable
A large variety of standard variants for an enhanced customer choice
If you need consistent, reliable performance with zero maintenance, Edwards‘ range of STP Maglev Turbomolecular Pumps sets the standard. The rotor is entirely suspended by magnetic bearings – perfect for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration.
STP Maglev Advanced High Throughput Series
The Advanced series offers high levels of throughput, perfect for your semiconductor etch and CVD processes:
Compact footprint
Throughput speeds from 300 l/s to 4,500 l/s
Throughput up to 6 slm and increased H2, N2 and Ar performances
STP Maglev Fully Integrated Controller & Power Supply
This all-in-one turbo pump solution eliminates the connection cable and rack conventionally required:
Reduced footprint, saving valuable fab real estate, installation time and cost
On-board power supply reduces energy consumption by up to 32% at high gas flows
Operating with throughput speeds from 300 l/s to 4,500 l/s
STP Maglev Ultra High Vacuum
The Ultra High Vacuum series offers unrivalled reliability, performance, cleanliness and class-leading low vibration levels:
D.C. power eliminates the need for batteries
Half rack controller features auto-tuning and advanced diagnostic features
Speeds from 300 l/s to 1,000 l/s and <10-10 mbar ultimate pressure CF flange
“C” version for harsh process is also available
STP Maglev Ultra High Vacuum Low Vibration Series
The Ultra High Vacuum Low Vibration version incorporates all the features of the Ultra High Vacuum series, plus a built-in vibration isolator to bring you ultra-low vibration performance.
The Edwards’ range of T-Station pumping systems combines a turbomolecular pump, a choice of backing pumps, and a simple controller, delivering pumping speeds of 47 to 300 I/s, ready-to-pump straight from the box.
Why is the T-Station an ideal solution?
Plug and Pump: no systemisation required!
Robust construction with a low cost of ownership.
Customer integrated control features.
Base plate includes rubber feet and cut-outs in the sides for manual handling giving a compact low profile but stable design that can’t be knocked over.
All metal frame: rugged design that can take abuse without cracking or breaking.
A range of backing pumps; choose from the latest oil-free scroll mXDS3s pump (with double the pumping speed, improved ultimate pressure, and inlet valve), also available are the XDD1 dry diaphragm pump or E2M1.5 oil sealed pump.
Quiet operation avoiding multiple fans: integrated air cooler acts to cool internal power supply and pump/controller.
Single dedicated button to start and stop.
Easy to read accurate display.
Ability to select vent mode: where a TAV5 vent valve is fitted for automated venting with no user intervention.
Available with either an NW40, ISO63 or CF63 inlet flange to suit your application.
