Exhaust Management Solutions

Used by most major semiconductor manufacturers, the inward-fired combustor has become a world standard in gas abatement since 1994.

Our unique combustion technology operates with a uniform combustion temperature. This ensures very low background emissions, and the inward flow of gas prevents process material contact with the chamber walls, which minimises the blockage by solids. The exclusive composition of the combustor material ensures superior resistance to corrosion and helps to provide the Atlas with unrivalled reliability and safety.

At our state of the art environmental innovation centre, we have process tuned solutions for outstanding performance, field proven and third party verified. Abatement DRE’s typically extend beyond global and local legislation:

• SiH4 and other Halides below TLV
• NF3 : >99% / <TLV
• F2 : : >99% / <TLV
• CF4 : >90%
• Other PFCs : >99%

With an expansive install base, unparalleled global applications team and service support, we can offer the best solution designed for your process needs. Get in touch with our team and we can work together for the ultimate resolution.