Turbomolecular Vacuum Pumps
Edwards, the world leader in vacuum technology introduces the nEXT generation of turbomolecular pumps. The EXT and STP ranges (with in excess of 200,000 units in the field), nEXT sets the new benchmark for scientific turbo pumps.
A turbomolecular pump is a multistage axial-flow turbine in which high speed rotating blades provide compression by increasing the probability of gas moving in the pumping direction. The turbomolecular pump is optimised for molecular flow conditions and requires a suitably sized backing pump to exhaust to atmosphere.
Turbomolecular Pump Services
FEATURED PRODUCTS
nEXT | Turbomolecular Pump
An Edwards turbomolecular pump is a multistage axial-flow turbine in which high-speed rotating blades provide compression by increasing the probabilit...
More About nEXT | Turbomolecular Pump
nEXT | Turbomolecular Pump
An Edwards turbomolecular pump is a multistage axial-flow turbine in which high-speed rotating blades provide compression by increasing the probability of gas moving in the pumping direction. The turbomolecular pump is optimised for molecular flow conditions and requires a suitably sized backing pump to exhaust to atmosphere.
nEXT has been designed to combine all the latest technological advances in pumps offering pump sizes of 55, 85, 240, 300, 400, 730, 925 and 1250 l/s pumping speeds for Nitrogen.
These pumps provide end-user serviceability and deliver a truly class-leading product.
Why choose nEXT Turbomolecular Pump?
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STP Maglev | Turbomolecular Pumps
If you need consistent, reliable performance with zero maintenance, Edwards‘ range of STP Maglev Turbomolecular Pumps sets the standard. The rot...
More About STP Maglev | Turbomolecular Pumps
STP Maglev | Turbomolecular Pumps
If you need consistent, reliable performance with zero maintenance, Edwards‘ range of STP Maglev Turbomolecular Pumps sets the standard. The rotor is entirely suspended by magnetic bearings – perfect for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration.
STP Maglev Advanced High Throughput Series
The Advanced series offers high levels of throughput, perfect for your semiconductor etch and CVD processes:
- Compact footprint
- Throughput speeds from 300 l/s to 4,500 l/s
- Throughput up to 6 slm and increased H2, N2 and Ar performances
STP Maglev Fully Integrated Controller & Power Supply
This all-in-one turbo pump solution eliminates the connection cable and rack conventionally required:
- Reduced footprint, saving valuable fab real estate, installation time and cost
- On-board power supply reduces energy consumption by up to 32% at high gas flows
- Operating with throughput speeds from 300 l/s to 4,500 l/s
STP Maglev Ultra High Vacuum
The Ultra High Vacuum series offers unrivalled reliability, performance, cleanliness and class-leading low vibration levels:
- D.C. power eliminates the need for batteries
- Half rack controller features auto-tuning and advanced diagnostic features
- Speeds from 300 l/s to 1,000 l/s and <10-10 mbar ultimate pressure CF flange
- “C” version for harsh process is also available
STP Maglev Ultra High Vacuum Low Vibration Series
The Ultra High Vacuum Low Vibration version incorporates all the features of the Ultra High Vacuum series, plus a built-in vibration isolator to bring you ultra-low vibration performance.
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