Semiconductor Vacuum Pumps
The Edwards EPX high vacuum dry pumps offer on-tool pumping in a lighter and smaller package, requiring only 1.4 kW of power. Using a unique, patented, single-shaft regenerative Holweck stage mechanism, EPX series pumps are capable of pumping from atmosphere to ultimate pressures with no risk of process contamination.
FEATURED PRODUCTS
Our innovative range of dry pumps brings you cutting-edge technology designed to enhance your semiconductor and electronics manufacturing environment....
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