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Semiconductor Vacuum Pumps

The Edwards Semiconductor Vacuum Pumps offer on-tool pumping in a lighter and smaller package, requiring only 1.4 kW of power. Using a unique, patented, single-shaft regenerative Holweck stage mechanism, EPX series pumps are capable of pumping from atmosphere to ultimate pressures with no risk of process contamination.

Edwards’ innovative range of dry pumps brings you cutting-edge technology designed to enhance your semiconductor and electronics manufacturing environment. Each range has been specifically designed to give advantages in environmental performance, reliability in harsh conditions and agility in light duty applications.

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Mason Technology